US 7,484,410 B2
Gyro sensor and sensor apparatus using same
Koji Tsuji, Suita (Japan); Kazuo Gouda, Osaka (Japan); Masao Kirihara, Kadoma (Japan); Youichi Nishijima, Osaka (Japan); and Satoshi Hyodo, Ashiya (Japan)
Assigned to Panasonic Electric Works Co., Ltd., Osaka (Japan)
Appl. No. 10/598,333
PCT Filed Mar. 14, 2005, PCT No. PCT/JP2005/004870
§ 371(c)(1), (2), (4) Date Dec. 08, 2006,
PCT Pub. No. WO2005/086597, PCT Pub. Date Sep. 22, 2005.
Claims priority of application No. 2004-071514 (JP), filed on Mar. 12, 2004; and application No. 2004-341136 (JP), filed on Nov. 25, 2004.
Prior Publication US 2008/0053224 A1, Mar. 06, 2008
Int. Cl. G01C 19/56 (2006.01); G01P 9/04 (2006.01)
U.S. Cl. 73—504.04  [73/504.12] 15 Claims
OG exemplary drawing
 
1. A gyro sensor comprising a primary base plate formed of a semiconductor substrate and provided with a detection mass body, a driven mass body and a detecting element, said detection mass body being displaceably supported relative to a support base plate in a plane along said support base plate through at least two detection springs having one end fixed to said support base plate, said driven mass body being connected to said detection mass body through a drive spring and configured to vibrate in a direction intersecting said support base plate, said detecting element configured to detect a displacement amount of said detection mass body in the plane along said support base plate, wherein said detection spring extends from said detection mass body in only one direction along said support base plate so as to support said detection mass body relative to said support base plate in a cantilever manner, the at least two detection springs each extending from said detection mass body in said only one direction and having flexibility in a displacement direction of said detection mass body, wherein respective distal ends of said at least two detection springs are connected to one another continuously and integrally through a coupling segment, said coupling segment having an intermediate portion fixed to said support base plate.