US 7,483,140 B1
Micro integrated planar optical waveguide type SPR sensor
Hyoung Jin Cho, Oviedo, Fla. (US); Hyungseok Bang, Orlando, Fla. (US); and Patrick Li Kam Wa, Orlando, Fla. (US)
Assigned to University of Central Florida Research Foundation, Inc., Orlando, Fla. (US)
Filed on Dec. 08, 2005, as Appl. No. 11/297,750.
Claims priority of provisional application 60/635725, filed on Dec. 10, 2004.
Int. Cl. G01N 21/55 (2006.01)
U.S. Cl. 356—445  [356/448] 21 Claims
OG exemplary drawing
 
1. A planar integrated surface plasmon resonance (SPR) sensor comprising:
a substrate having a first side and a second side;
an planar optical waveguide fabricated on a surface of the first side of the substrate, the optical waveguide having a first end and a second end;
a wavelength tunable emitter on a same surface of the substrate coupled with the first end of the optical waveguide wherein the wavelength of the emitted light is varied to obtain a transmission spectrum of light which passes through a sensing region for detecting variations in a refractive index by monitoring a maximum absorption peak shift in a wavelength domain;
at one single photodetector formed on the same surface of the substrate coupled with the second end of the optical waveguide for measuring a transmitted intensity of light exiting the second end of the planar optical waveguide; and
at least one SPR sensor area formed on the first side of the substrate to couple with a section of the optical waveguide between the wavelength tunable laser and the one single photodetector, wherein the optical waveguide routes a light from the light source past the at least one SPR sensor area which evanescently penetrates the at least one SPR sensor area.