| US 7,483,133 B2 | ||
| Multiple angle of incidence spectroscopic scatterometer system | ||
| Noah Bareket, Saratoga, Calif. (US); and Haiming Wang, Fremont, Calif. (US) | ||
| Assigned to KLA-Tencor Technologies Corporation., Milpitas, Calif. (US) | ||
| Filed on Mar. 11, 2005, as Appl. No. 11/78,572. | ||
| Claims priority of provisional application 60/635305, filed on Dec. 09, 2004. | ||
| Prior Publication US 2006/0126079 A1, Jun. 15, 2006 | ||
| Int. Cl. G01J 3/28 (2006.01); G01J 3/42 (2006.01); G01J 3/427 (2006.01); G01B 11/14 (2006.01); G01B 11/04 (2006.01); G01B 11/08 (2006.01) | ||
| U.S. Cl. 356—326 [356/319; 356/625; 356/636] | 21 Claims |
| 1. A method for measuring a sample comprising:
defining a spectroscopic measurement model of the sample for calculating a theoretical characteristic of diffracted light
from the sample based on a plurality of sample variables and a plurality of sets of measurement angles for an incident light
upon the sample;
determining a set of desired measurement angles to be used for a spectroscopic measurement system, wherein the determination
is accomplished by using the spectroscopic measurement model so that the set of desired measurement angles result in a calculated
theoretical characteristic of diffracted light that is most sensitive to at least one of the sample variables as compared
to other sets of measurement angles;
after determining the set of desired measurement angles, directing an incident beam of the spectroscopic measurement system
upon the sample at the desired set of measurement angles, wherein the incident beam causes a release of energy from the sample
in the form of diffracted light; and
measuring the diffracted light from the sample.
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