US 7,482,732 B2
Layered surface acoustic wave sensor
Kourosh Kalantar-Zadeh, Melbourne (Australia)
Assigned to MNT Innovations Pty Ltd, Scoresby (Australia)
Appl. No. 10/590,367
PCT Filed Feb. 25, 2005, PCT No. PCT/AU2005/000244
§ 371(c)(1), (2), (4) Date Oct. 10, 2006,
PCT Pub. No. WO2005/083882, PCT Pub. Date Sep. 09, 2005.
Claims priority of application No. 2004900942 (AU), filed on Feb. 26, 2004.
Prior Publication US 2007/0241637 A1, Oct. 18, 2007
Int. Cl. H01L 41/04 (2006.01)
U.S. Cl. 310—323.21  [73/514.34; 324/633] 7 Claims
OG exemplary drawing
 
1. A biological sensor which incorporates
a) a first layered SAW device consisting of a piezoelectric crystal with interdigital electrodes on its surface, and second piezoelectric layer, of a different material to said piezoelectric crystal, over said interdigital electrodes
b) a second layered SAW device consisting of a piezoelectric crystal with interdigital electrodes on its surface, a second piezoelectric layer, of a different material to said piezoelectric crystal over said interdigital electrodes and an analyte sensitive surface on said second piezoelectric layer
c) both saw devices are fabricated on the same substrate and have an appropriate cavity length and aperture size
d) the resonator circuits of each saw sensor incorporate amplifiers which are dependent.