	US 7,482,586 B2
	Methods for sample preparation and observation, charged particle apparatus
Tohru Ishitani, Hitachinaka (Japan); Uki Kabasawa, Hitachinaka (Japan); and Tsuyoshi Ohnishi, Hitachinaka (Japan)
Assigned to Hitachi High-Technologies Corporation, Tokyo (Japan)
Filed on Jul. 07, 2006, as Appl. No. 11/482,094.
Claims priority of application No. 2005-200833 (JP), filed on Jul. 08, 2005.
Prior Publication US 2007/0023651 A1, Feb. 01, 2007
Int. Cl. G01N 31/00 (2006.01); G01N 33/00 (2006.01); G01N 23/00 (2006.01); G21K 7/00 (2006.01); G21K 5/10 (2006.01); H01J 37/08 (2006.01)

U.S. Cl. 250—306 [250/304; 250/311; 250/310; 250/307; 250/492.21]

9 Claims

1. Methods of preparing and observing a sample in which a cross section formed on a sample surface is moved in a direction in which the cross section moves backward by processing the sample surface using a focused ion beam; in which an electron beam is irradiated on the cross section in a direction of an axis obliquely crossing an irradiation axis of the focused ion beam; and in which the moving sample cross section is observed with a scanning electron microscope, wherein

tilting information on the sample surface is obtained;

an angle between an irradiation axis of the focused ion beam and an irradiation axis of the electron beam as well as the tilting information on the sample surface is used, and the correction coefficients are obtained which correspond to an amount of movement of a field of view of the scanning electron microscope and an amount of a deviation of a focus position of the same, the movement of a field of view and the deviation of a focus position occurring due to the movement of the sample cross section by the processing; and

the movement of a field of view and the deviation of a focus position of the scanning electron microscope are corrected by use of the correction coefficients, and the field of view and the focus position are caused to follow the movement of the sample cross section.