| US 7,482,175 B2 | ||
| Method of manufacturing substrate having periodically poled regions | ||
| Katuhiko Tokuda, Atsugi (Japan); and Kazutomo Kadokura, Atsugi (Japan) | ||
| Assigned to Shimadzu Corporation, Kyoto-shi (Japan) | ||
| Filed on Dec. 20, 2005, as Appl. No. 11/312,308. | ||
| Claims priority of application No. 2005-184828 (JP), filed on Jun. 24, 2005. | ||
| Prior Publication US 2006/0292706 A1, Dec. 28, 2006 | ||
| Int. Cl. H01L 21/00 (2006.01) | ||
| U.S. Cl. 438—3 [257/E21.208] | 10 Claims |
| 1. A method of manufacturing a substrate having periodically poled regions, comprising:
providing a solely polarized ferroelectric substrate having opposite surfaces provided with electrodes at least one of which
is a periodic electrode;
applying a DC voltage between the electrodes;
increasing the DC voltage gradually while observing an inversion current flowing in the substrate; and
maintaining a value of the DC voltage, which is obtained by adding a predetermined value to a value of the DC voltage of when
a value of the inversion current is once increased and then decreased.
|