US 7,480,992 B2
	Cooling plate and manufacturing method thereof, and sputtering target and manufacturing method thereof
Kazutaka Okamoto, Hitachi (Japan); Masayuki Doi, Hitachinaka (Japan); Hisanori Okamura, Tokai (Japan); Yasuhisa Aono, Hitachi (Japan); Manabu Kagawa, Ishioka (Japan); Satoshi Hirano, Hitachi (Japan); and Kinya Aota, Hitachi (Japan)
Assigned to Hitachi, Ltd., Tokyo (Japan); and HItachi Cable, Ltd., Tokyo (Japan)
Filed on Mar. 29, 2007, as Appl. No. 11/693,431.
Application 11/693431 is a division of application No. 11/302117, filed on Dec. 14, 2005.
Application 11/302117 is a continuation of application No. 10/828234, filed on Apr. 21, 2004, abandoned.
Application 10/828234 is a continuation of application No. 10/024598, filed on Dec. 21, 2001, abandoned.
Claims priority of application No. 2000-390165 (JP), filed on Dec. 22, 2000; and application No. 2001-153962 (JP), filed on May 23, 2001.
Prior Publication US 2007/0163120 A1, Jul. 19, 2007
Int. Cl. B21D 21/00 (2006.01); B21D 39/00 (2006.01); B23K 20/12 (2006.01); B23K 31/00 (2006.01); B23K 31/02 (2006.01); B23P 6/00 (2006.01); F28F 1/00 (2006.01); F28F 3/14 (2006.01)

U.S. Cl. 29—890.054  [29/890.032; 29/890.053; 165/170; 165/177; 228/169; 228/165; 228/114.5; 228/112.1; 228/2.1]

9 Claims

2. A manufacturing method of a cooling plate comprising a body made of copper or copper alloy and a lid made of copper or copper alloy, said body having a groove, which becomes a passage of a coolant, comprising joining the lid and the body so as to cover the groove by the lid by friction stir welding owing to insertion of a rotation tool which has a shoulder and a pin, and setting a center of the rotation tool in a position which is apart from an edge of the groove by a radius of the pin or more as well as the rotation tool outside the passage.