| US 7,480,974 B2 | ||
| Methods of making gas distribution members for plasma processing apparatuses | ||
| Robert J. Steger, Los Altos, Calif. (US) | ||
| Assigned to Lam Research Corporation, Fremont, Calif. (US) | ||
| Filed on Feb. 15, 2005, as Appl. No. 11/57,433. | ||
| Prior Publication US 2006/0180275 A1, Aug. 17, 2006 | ||
| Int. Cl. B23Q 17/00 (2006.01); C23F 1/00 (2006.01) | ||
| U.S. Cl. 29—407.05 [156/345.34] | 17 Claims |
| 1. A method of making a gas distribution member for a plasma processing apparatus, comprising:
fabricating gas injection holes which extend between opposed inlet and outlet surfaces of the gas distribution member;
measuring a total gas flow that exits from the gas injection holes at the outlet surface for each of a plurality of zones
of the gas distribution member; and
based on the total gas flows measured for each of the zones, adjusting gas permeability of the gas distribution member at
one or more of the zones to achieve a desired gas flow distribution pattern at the outlet surface.
|