| US 7,476,952 B2 | ||
| Semiconductor input control device | ||
| Vladimir Vaganov, 129 El Parton, Los Gatos, Calif. 95032 (US); and Nickolai Belov, 118 Plazoleta, Los Gatos, Calif. 95032 (US) | ||
| Filed on May 21, 2007, as Appl. No. 11/804,954. | ||
| Application 11/804954 is a continuation in part of application No. 11/025642, filed on Dec. 28, 2004. | ||
| Claims priority of provisional application 60/802276, filed on May 22, 2006. | ||
| Prior Publication US 2007/0264743 A1, Nov. 15, 2007 | ||
| Int. Cl. H01L 23/04 (2006.01); H01L 23/48 (2006.01); H01L 23/52 (2006.01); H01L 23/28 (2006.01) | ||
| U.S. Cl. 257—415 [257/730; 257/778; 257/787; 257/E23.123; 257/E23.124] | 35 Claims |
| 1. Semiconductor input control device for inputting mechanical signals into an electronic system comprising:
a force sensor die formed within semiconductor substrate and containing:
a force sensor providing electrical output signal in response to applied external force, connection elements for electrical
and mechanical connection within an electronic system;
a package:
enclosing a part of the force sensor die and comprising a force-transferring element, which is coupled to the sensor die and
transfers an external force to the force sensor die;
wherein connection elements of the force sensor die are exposed for direct mounting of the semiconductor input control device
within an electronic system.
|