| US 7,476,869 B2 | ||
| Gas distributor for ion source | ||
| David M. Burtner, Belmont, Mass. (US); Scott A. Townsend, Fort Collins, Colo. (US); and Daniel E. Siegfried, Fort Collins, Colo. (US) | ||
| Assigned to Veeco Instruments, Inc., Woodbury, N.Y. (US) | ||
| Filed on Jan. 12, 2007, as Appl. No. 11/622,981. | ||
| Application 11/622981 is a continuation in part of application No. 11/061254, filed on Feb. 18, 2005, granted, now 7,342,236. | ||
| Claims priority of provisional application 60/759089, filed on Jan. 13, 2006. | ||
| Prior Publication US 2007/0273289 A1, Nov. 29, 2007 | ||
| This patent is subject to a terminal disclaimer. | ||
| Int. Cl. H01J 49/10 (2006.01); H01J 37/08 (2006.01); H01J 7/24 (2006.01) | ||
| U.S. Cl. 250—423R [250/424; 250/426; 315/111.81; 315/111.91; 315/111.41; 313/362.1] | 25 Claims |
| 1. A gas distributor for incorporation in an anode assembly of an ion source, the gas distributor comprising
a disk with a top surface and a bottom surface, wherein
the disk defines at least two apertures for acceptance of respective fastening bolts; and
the at least two apertures are positioned with respect to a toroid-shaped anode in the anode assembly such that the at least
two apertures are positioned outside an inner diameter of the toroid-shaped anode.
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