| US 7,476,868 B2 | ||
| Apparatus and method for generating ions of an ion implanter | ||
| Seong Gu Kim, Pyeongtaek-si (Korea, Republic of); Jai Kwang Shin, Anyang-si (Korea, Republic of); and Jae Joon Oh, Seongnam-si (Korea, Republic of) | ||
| Assigned to Samsung Electronics Co., Ltd., Suwon-Si (Korea, Republic of) | ||
| Filed on Jun. 15, 2006, as Appl. No. 11/453,075. | ||
| Claims priority of application No. 10-2005-0135135 (KR), filed on Dec. 30, 2005. | ||
| Prior Publication US 2007/0152165 A1, Jul. 05, 2007 | ||
| Int. Cl. H01J 37/08 (2006.01); H01J 37/30 (2006.01) | ||
| U.S. Cl. 250—423R [250/492.21; 250/492.3; 315/111.31; 315/111.81] | 9 Claims |

| 1. An ion generator of an ion implanter, the ion generator comprising:
an arc chamber provided with a slit for ion extraction and forming an equipotential surface with a first voltage, wherein
the arc chamber has first, second, third, and fourth surfaces, the second and third surfaces are perpendicular to the first
and fourth surfaces, and the slit is provided through the first surface of the arc chamber;
a filament, installed inside of the arc chamber, heated to a predetermined temperature, and generating electrons, wherein
the filament is installed inside of the arc chamber to correspond to a second surface, which is perpendicular to the first
surface;
first and second magnetic field devices, positioned outside of the arc chamber, supplied with a current from a current source,
and generating a magnetic field in the arc chamber for ion extraction, wherein the first magnetic field device is positioned
outside of the arc chamber in a position corresponding to the second surface and the second magnetic field device is positioned
outside of the arc chamber in a position corresponding to the third surface;
a gas discharge device injecting a predetermined gas into the arc chamber;
an electrode, positioned opposite to the slit, supplied with a second voltage from a voltage source, and generating an electric
field in the arc chamber, wherein the second voltage has a higher voltage than the first voltage, wherein the electrode is
provided on the fourth surface; and
a synchronization control unit temporally synchronizing output signals of the current source to supply current to the first
and second magnetic field devices and output signals of the voltage source to supply second voltage to the electrode for ion
extraction.
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