| US 7,476,858 B2 | ||
| Particle detection auditing system and method | ||
| Frederick H. Schamber, Murrysville, Pa. (US); and Cornelis G. van Beek, Pittsburgh, Pa. (US) | ||
| Assigned to Aspex Corporation, Delmont, Pa. (US) | ||
| Filed on Oct. 23, 2006, as Appl. No. 11/584,950. | ||
| Claims priority of provisional application 60/729934, filed on Oct. 26, 2005. | ||
| Prior Publication US 2007/0114407 A1, May 24, 2007 | ||
| Int. Cl. H01J 37/26 (2006.01); H01J 37/28 (2006.01) | ||
| U.S. Cl. 250—310 [250/306; 250/311; 250/492.2] | 20 Claims |
| 1. A system for evaluating the performance of a particle detecting and measuring instrument wherein said instrument receives
a specimen and detects the number of particles on said specimen and measures the descriptive parameters of said particles,
said system comprising:
a known specimen received by said instrument and wherein said known specimen has known particles on said specimen, with known
parameters of each said known particle on said specimen;
said instrument detecting said known particles and measuring the parameters thereof;
a matching of individual said measured particles against individual said known particles by means of selected known parameters
thereof;
a comparison of said parameters of each said measured particle against said parameters of said known particle to which said
measured particle was matched; and
an indication provided of said instrument's performance as a function of said matching and said comparison.
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