| US 7,474,405 B2 | ||
| Miniature Fourier transform spectrophotometer | ||
| Michael Scott Kranz, Madison, Ala. (US); Larry Christopher Heaton, Huntsville, Ala. (US); and Calvin Wayne Long, Tullahoma, Tenn. (US) | ||
| Assigned to Morgan Research Corporation, Huntsville, Ala. (US) | ||
| Filed on Feb. 20, 2008, as Appl. No. 12/33,927. | ||
| Application 12/033927 is a division of application No. 11/282235, filed on Nov. 18, 2005, granted, now 7,359,058. | ||
| Claims priority of provisional application 60/629073, filed on Nov. 18, 2004. | ||
| Prior Publication US 2008/0198388 A1, Aug. 21, 2008 | ||
| Int. Cl. G01B 9/02 (2006.01) | ||
| U.S. Cl. 356—450 [356/452] | 8 Claims |
| 1. A miniature Michelson interferometer comprising a cube beamsplitter monolithically integrated with an optical path modulator,
the cube beamsplitter comprising a static path side and a differential path side, the optical path modulator comprising:
a multi-stepped mirror array in physical contact with the differential path side of the cube beamsplitter, comprising a plurality
of stepped mirror elements, the stepped mirror elements having a step height, the step height being a function of x-direction
step position and y-direction step position on the multi-stepped mirror array; and
a stationary mirror in physical contact with the static path side of the cube beamsplitter.
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