Errata "All reference to Patent No. 5,379,091 to Osamu Tanitsu et. al. of Kawasaki-shi, Japan for ILLUMINATION OPTICAL APPARATUS AND SCANNING EXPOSURE APPARATUS appearing in the Official Gazette of January 3, 1995 should be deleted since no patent was granted." Errata "All reference to Patent No. 5,381,111 to Stephen W. Hobrecht of California for VARIABLE RESISTANCE TERMINATION CIRCUIT appearing in the Official Gazette of January 10, 1995 should be deleted since no patent was granted."